PROPERTIES OF STANDARD FLUOROELASTOMERS |
 |
| Description:
Excellent resistance to petroleum
products and solvents. Very good
high-temperature performance. Fluorocarbon
elastomers make up the most widely used seals
in the semiconductor industry.y
Limitations: Avoid polar solvents, amines, anhydrous ammonia, SKYDROL, hydrazine and hot acids. Chemistry: Copolymer of vinylidene fluoride and hexafluoropropylene, although many more exotic versions exist for improved chemical resistance or low temperature performance. Trade Names: VITON, FLUOREL, TECHNOFLON, DAI-EL ASTM D1418 Designation: FKM ASTM D2000/SAE J200 Type, Class: HK |
Typical Uses: Crystal Growth, Epitaxial Silicon, LPCVD/Oxidation, Coater/Developer, CVD, Dry Etch, Wet Etch, Cleaning, Resist Stripping, Ion Implant, PVD Temperature Range: Ò40É to 200ÉC (Ò40É to 392ÉF) |
| ISC-FNGP Compound |
Color | Hardness (Shore A) |
Tensile Mpa (psi) |
Elongation (%) |
70hr C/S @200ÜC |
Low Temp |
High Temp |
|
| V75 | Black | 78 | 14.5 (2,100) |
190 | 7 | -25ÉC (-13ÉF) |
200ÉC (392ÉF) |
<<Select |
| V60 | Black | 63 | 13.1 (1,900) |
225 | 8 | -25ÉC (-13ÉF) |
200ÉC (392ÉF) |
<<Select |
| V121 | Black | 75 | 13.6 (1,970) |
240 | 13 | -20ÉC (-4ÉF) |
200ÉC (392ÉF) |
<<Select |
| V176 | Black | 75 | 17.2 (2,490) |
350 | 10 | -20ÉC (-4ÉF) |
200ÉC (392ÉF) |
<<Select |
| V141 | Black | 79 | 15.7 (2,270) |
230 | 29 | -15ÉC (5ÉF) |
200ÉC (392ÉF) |
<<Select |
| V115 | Black | 75 | 15.0 (2,180) |
185 | 10 | -35ÉC (-31ÉF) |
200ÉC (392ÉF) |
<<Select |
| V123 | Black | 73 | 17.6 (2,550) |
140 | 15 | -35ÉC (-31ÉF) |
200ÉC (392ÉF) |
<<Select |